Energy transfer coefficient for elastic scattering in magnetron¶
The traveling atom moves towards the substrate in the magnetron. At the same time, it collides with gas atoms. The energy transfer coefficient in these collisions depends on the mass of the traveling atom and the mass of the gas atom.
- energy_transfer_coefficient¶
Energy transfer coefficient.
- Symbol:
x- Latex:
\(x\)
- Dimension:
dimensionless
- Symbol:
m_1- Latex:
\(m_{1}\)
- Dimension:
mass
- Symbol:
m_2- Latex:
\(m_{2}\)
- Dimension:
mass
- law¶
x = 2 * m_1 * m_2 / (m_1 + m_2)^2- Latex:
- \[x = \frac{2 m_{1} m_{2}}{\left(m_{1} + m_{2}\right)^{2}}\]