Distance of greatest convergence of particles in magnetron¶
The traveling atom moves towards the substrate in the magnetron. At the same time, it collides with gas atoms. The energy transfer coefficient in these collisions depends on the mass of the traveling atom and the mass of the gas atom. The distance of the greatest convergence of colliding particles can be calculated using the model of quasi-rigid spheres. The discharge voltage is the voltage between the cathode and the anode in the magnetron at which plasma occurs.
- distance_of_convergence¶
euclidean_distanceof greatest convergence of two colliding particles.
- Symbol:
d- Latex:
\(d\)
- Dimension:
length
- Symbol:
V- Latex:
\(V\)
- Dimension:
voltage
- first_atomic_number¶
atomic_numberof first atom.
- Symbol:
Z_1- Latex:
\(Z_{1}\)
- Dimension:
dimensionless
- second_atomic_number¶
atomic_numberof second atom.
- Symbol:
Z_2- Latex:
\(Z_{2}\)
- Dimension:
dimensionless
- distance_constant¶
Constant equal to \(0.122 \cdot 10^{-10} \, \text{m}\).
- Symbol:
d_0- Latex:
\(d_0\)
- Dimension:
length
- voltage_constant¶
Constant equal to \(95.863 \, \text{V}\).
- Symbol:
V_0- Latex:
\(V_0\)
- Dimension:
voltage
- law¶
d = -d_0 * (Z_1^0.0387 + Z_2^0.0387) * log(V / (V_0 * (Z_1 * Z_2)^1.4883))- Latex:
- \[d = - d_0 \left(Z_{1}^{0.0387} + Z_{2}^{0.0387}\right) \log \left( \frac{V}{V_0 \left(Z_{1} Z_{2}\right)^{1.4883}} \right)\]