Boundary of thermalization zone of atomized atoms in magnetron¶
The atoms of the target material evaporate and move towards the substrate inside the magnetron. There is a distance at which the energy of the traveling atom will decrease to the energy of the thermal motion of the atoms of the gas-discharge plasma. This distance is called the boundary of the thermalization zone. The decrease in energy occurs due to the collision of the traveling atom with the gas atoms in the magnetron. The free path length is the distance that the sprayed gas travels between two collisions. The traveling atom moves towards the substrate in the magnetron. At the same time, it collides with gas atoms. The number of collisions of a traveling atom is the number of collisions, after which its energy will be equal to the energy of thermal motion in a gas-discharge plasma.
- boundary_of_thermalization_zone¶
Boundary of thermalization zone of traveling atoms in magnetron. See
length.- Symbol:
l- Latex:
\(l\)
- Dimension:
length
- number_of_collisions_of_atom¶
Number (
nonnegative_number) of collisions of traveling atom with gas atoms.- Symbol:
N- Latex:
\(N\)
- Dimension:
dimensionless
- free_path_length¶
mean_free_pathof traveling atoms.- Symbol:
lambda- Latex:
\(\lambda\)
- Dimension:
length
- law¶
l = N * lambda- Latex:
- \[l = N \lambda\]