Number of collisions of particle with gas in magnetron¶
The atoms of the target material evaporate and move towards the substrate inside the magnetron. The traveling atom moves towards the substrate in the magnetron. At the same time, it collides with gas atoms. The number of collisions of a traveling atom, after which its energy will be equal to the energy of thermal motion in a gas-discharge plasma, can be calculated. This amount will depend on the initial energy of the traveling atom and the energy transfer coefficient between the atom and the gas atoms.
- collision_count¶
Number of collisions between the particle and gas.
- Symbol:
N- Latex:
\(N\)
- Dimension:
dimensionless
- Symbol:
E_0- Latex:
\(E_{0}\)
- Dimension:
energy
- Symbol:
E- Latex:
\(E\)
- Dimension:
energy
- energy_transfer_coefficient¶
Energy transfer coefficient between the particle and the gas.
- Symbol:
x- Latex:
\(x\)
- Dimension:
dimensionless
- law¶
N = log(E / E_0) / log(1 - x)- Latex:
- \[N = \frac{\log \left( \frac{E}{E_{0}} \right)}{\log \left( 1 - x \right)}\]