Magnetron¶
Effective cross section
The effective cross section is a physical quantity characterizing the probability of transition of a system of two interacting particles to a certain final state, a quantitative characteristic of the acts of collision of particles of a stream hitting a target with target particles. The effective cross-section has the dimension of the area.
Contents:
- Boundary of thermalization zone of atomized atoms in magnetron
- Distance of greatest convergence of particles in magnetron
- Energy transfer coefficient for elastic scattering in magnetron
- Etch rate of target in magnetron
- Interaction cross section in Coulomb’s interaction model
- Interaction cross section in elastic interaction model
- Interaction cross section in model of hard spheres
- Interaction cross section in recharge model
- Number of collisions of particle with gas in magnetron